Hollow Inorganic Nanospheres and Nanotubes with Tunable Wall Thicknesses by Atomic Layer Deposition on Self‐Assembled Polymeric Templates

Abstract

The construction of inorganic nanostructures with hollow interiors is demonstrated by coating self-assembled polymeric nano-objects with a thin Al2O3 layer by atomic layer deposition (ALD), followed by removal of the polymer template upon heating. The morphology of the nano-object (i.e., spherical or cylindrical) is controlled by the block lengths of the copolymer. The thickness of the Al2O3 wall is controlled by the number of ALD cycles.