Evaluation of damage in InGaZnO₄ induced by plasma using electron spin resonance measurement

Abstract

Damage in InGaZnO 4 (IGZO) powder induced by plasma was evaluated using electron spin resonance (ESR) measurement. An ESR signal was found at g = 1.939 with a peak-to-peak width of Δ g = 0.006, and another weak signal was found at g = 2.003 with Δ g = 0.003. The former ESR signal results from singly ionized oxygen vacancies caused by the trapping of an unpaired electron surrounding Ga 3+ and Zn 2+ , whereas the latter signal results from free electrons or oxygen vacancies surrounding In 3+ .