Thin film resonators and filters

Abstract

This paper presents an overview of the thin film resonator technology as it has been developed over the past few years. A brief discussion of the basic elements of wireless systems is described in order to set the stage for a description of the important enabling aspects of what is generally termed the thin film resonator (TFR) technology. Features of TFRs will be described along with specific examples of resonators and filters. The all important packaging problem is described in the context of device performance and manufacturing.