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A comparison of the AlN annealing cap for 4H–SiC annealed in nitrogen versus argon atmosphere

DOI

15

Citations

6

References

2004

Year

Michael A. Derenge, Keith Jones, K. W. Kirchner, Matthew H. Ervin, T.S. Zheleva, Shiva S. Hullavarad, R. D. Vispute
Solid-State Electronics

References

YearCitations

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