2009 · 156 citations · 1 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsCmos Circuit DesignComplementary Metal-oxide-semiconductor TechnologyIntegrated Circuit DevicesIntegrated Circuit FabricationMetal-oxide-semiconductor Field-effect TransistorsThermal Properties Of SemiconductorsCmos Fabrication ProcessesThermal Effects In Integrated Circuits
We report the fabrication of junctionless SOI MOSFETs. Such devices greatly simplify processing thermal budget and behave as regular multigate SOI transistors.
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