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An Experimental Study of Various Cross Sheet Resistor Test Structures
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1978
Year
Materials EngineeringMaterials ScienceElectrical EngineeringSheet ResistanceEngineeringCross Sheet ResistorsResistorSpecific ResistanceMechanical EngineeringExperimental StudyMaterial PerformanceSmall Cross StructuresElectrical PropertyElectrical Insulation
Newly designed cross sheet resistors are shown to give the same (within 0.5%) measured sheet resistance as conventional van der Pauw structures. Diffused boron and phosphorus layers with sheet resistances near 200 Ω/□ were studied with the sampled areas varying from a square 6.4 μm (0.25 mil) on a side to a circle 762 μm (30.0 mils) in diameter. An increase in measured sheet resistance values was observed due to surface leakage currents, and an equivalent circuit model was developed to explain the results. The effect of joule heating on measured sheet resistance values was observed in both large and small cross structures.