The influence of argon ion bombardment on the electrical and optical properties of clean silicon surfaces - Concepedia

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The influence of argon ion bombardment on the electrical and optical properties of clean silicon surfaces

11

Citations

37

References

1981

Year

J.W.D. Martens, W.F. Van Den Bogert, A. van Silfhout

Surface Science

Electrical EngineeringIon ImplantationEngineeringPhysicsOptical PropertiesSurface ScienceApplied PhysicsSemiconductor Device FabricationArgon Ion BombardmentClean Silicon SurfacesSilicon On InsulatorIon EmissionPlasma EtchingOptoelectronics

References

	Year	Citations

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