Publication | Closed Access
Flexible Nanowiring of Metal on Nonplanar Substrates by Femtosecond‐Laser‐Induced Electroless Plating
136
Citations
35
References
2010
Year
Flexible NanowiringEngineeringNonplanar SubstratesLine WidthGood ConductivityMetallic NanomaterialsMicro-optical ComponentMicro-electromechanical SystemMetal MicropatternsMicromachinesLaser Micro-processingMicroscale SystemMicrofluidicsNanophotonicsMaterials ScienceElectrical EngineeringNanotechnologyLaser Processing TechnologyLaser-assisted DepositionHeat TransferMicroelectronicsFemtosecond‐laser‐induced ElectrolessAdvanced Laser ProcessingFlexible ElectronicsMicrofabricationApplied PhysicsNanofabricationMicromachiningLaser-surface Interactions
Metal micropatterns with good conductivity are directly written on various nonplanar substrates by immersion in a metal-salt solution and laser-induced electroless plating. The line width is adjusted by control of the laser power. A microheater inside a microchannel is fabricated for use in small-region temperature regulation.
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