Microelectronic Engineering · 2005 · 24 citations · 9 references
Natural SciencesMaterials EngineeringMaterials ScienceElectrochemistrySurface ChemistrySurface ScienceSemiconductor InterfacesSemiconductor SurfacesSilicon MaterialsSurface ModificationSurface PassivationThin-film MaterialsElectrode PassivationPassivation LayersPassivation Of Silicon SurfacesSilicon PassivationSurface Passivation Layers
9
Stefan Rauscher, Th. Dittrich, M. Aggour et al. · Applied Physics Letters · 1995 · 40 citations
Natural Sciences, Materials Engineering, Materials Science +17