2002 · 44 citations · 7 references
EngineeringComputer EngineeringElectrical EngineeringElectronic MaterialsMicroelectronicsSemiconductor DevicesDevice CharacterizationDevice ModelingDevice ScalingDevice SimulationIntegrated Circuit DesignSemiconductor PhysicsCompact Device ModelingCompact ModelingGate Oxide Thickness EffectsMetal-oxide-semiconductor Field-effect Transistor ModelingMosfet ModelingPolysiliconProcess ParametersSurface Potential
We present a physical and continuous compact MOSFET model applicable to deep sub-micron devices with very thin gate oxide thicknesses. We focus on the premise that a good compact model should be based on a physical long-channel model that accurately fits both I-V and C-V data. To meet this requirement, we found that the model must account for the correct bias dependency of the surface potential, and include polysilicon depletion and quantum mechanical effects. The resulting model is predictive within a range of the fundamental process parameters, and is thus suitable for statistical circuit simulations.
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Carrier transport near the Si/SiO2 interface of a MOSFET
W. Hänsch, Th. Vogelsang, R. Kircher et al. · Solid-State Electronics · 1989 · 207 citations