Maximum entropy reconstruction of compositional depth profiles from electron probe microanalysis data

Abstract

Summary Electron probe microanalysis (EPMA) is a powerful method for the quantitative determination of the elemental composition of micro‐regions of a sample surface. Here, we report on the development of a method of reconstructing compositional depth profiles in thin films from EPMA data measured over a range of electron beam energies, using maximum entropy data processing. The method gives quantitative information on film compositions up to approximately 1 μm in depth, with a lateral spatial resolution of approximately 1 μm. The method is tested using both simulated data and measured experimental data from well‐characterized model sample structures.