2002 · 105 citations · 4 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMechanical Behavior Of MaterialsMicroelectromechanical SystemsDevice ReliabilityFatigueMems MaterialsMems ReliabilityMems TestingSemiconductor ReliabilityElectrical ReliabilityFailure Mode AssessmentFailure Mode InvestigationFatigue Testing Of Mems DevicesMems Failure AnalysisMems Reliability TestingPolysiliconStress-induced Failure
Reliable operation of MEMS requires development of accelerated testing techniques and protocols. One such technique using resonant fatigue specimens has demonstrated a failure mode that was previously unknown. This work indicates that moisture can decrease the lifetime of cyclicly stressed polysilicon components.
4
Slow Crack Growth in Single-Crystal Silicon
J. A. Connally, Stuart B. Brown · Science · 1992 · 185 citations
Micromechanical fatigue testing
J. A. Connally, Stuart B. Brown · Experimental Mechanics · 1993 · 68 citations
Reliability and long term stability of MEMS
Stuart B. Brown, Eelco Jansen · 2002 · 23 citations
Engineering, Materials Engineering, Mechanical Engineering +16