IEEE Transactions on Electron Devices · 1975 · 61 citations · 2 references
Natural SciencesElectrical EngineeringOptical MaterialsOpticsOptoelectronicsExposure ControlFilm ExposureLight Damage MitigationPhotoresist ChemistryPhotoresistsPhotoresponsive MaterialsResidual Effects
A process is described for reducing the residual effects of standing waves upon exposed and developed lines in positive photoresist films.
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