Concepedia

Vacuum technology, thin films and sputtering: An introduction

Vacuum · 1984 · 37 citations · 0 references

Concepts

Natural SciencesMaterials SciencePhysicsMaterials ChemistrySurface ScienceThin FilmsChemical Vapor DepositionPhysical Vapor DepositionThin Film Electrical PropertiesThin Film Surface MorphologyThin-film DepositionThin-film MaterialsSputter DepositionSputteringSputtering ProcessesSputtering TechniquesVacuum Technology