An analytical model and verification for MEMS Pirani gauges

Abstract

A new analytical model for the design of micromachined Pirani gauges operating in constant current mode is presented. This model expresses the pressure range as a closed-form analytical function of the design variables such as geometry and biasing. Furthermore, it yields simplified expressions for other performance parameters such as the sensitivity, output swing and power consumption. A Pirani gauge has been designed according to the presented model and has been fabricated and characterized in order to verify the validity of the model. The measurements match the theory closely. The model will be useful to designers who need to trade off performance against the costs of chip area and biasing power.