Publication | Open Access

Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators

Materials ScienceEngineeringMicrofabricationMechanical EngineeringApplied PhysicsNano Electro Mechanical SystemSlender Piezoelectric CantileversActuationMems ActuatorsPiezoelectric MaterialMicroactuatorThin FilmsTi Thin FilmMicroelectronicsMicro-electromechanical System