Applied Physics A · 2003 · 158 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceDrillingMetallurgyMicrofabricationDrilling OperationsLaser Material ProcessingLaser OpticsLaser PhysicsMetal FabricationUltrafast OpticsDeep Hole DrillingFemtosecond Laser PulsesLaser AblationLaser DrillingLaser Pulse DurationLaser-induced BreakdownOptical BreakdownUltrafast Laser Material Processing