Characterization of β‐Silicon Nitride Whiskers

Abstract

The physical, chemical, and structural properties of a commercially available β‐Si 3 N 4 whisker were characterized. Bulk chemical analysis indicated that the whiskers were close to stoichiometric silicon nitride, with oxygen and yttrium as the major impurities. Surface chemistry analysis by XPS analysis revealed that the surfaces consisted primarily of silicon nitride, with the oxygen and yttrium impurities concentrated at the surfaces. SEM and STEM studies indicated that the whiskers were dimensionally straight with relatively featureless surfaces, although some whiskers had Y‐rich particles attached. The whiskers were also found to be of extreme crystallographic perfection, as determined by TEM analysis.