Micromechanical resonator with ultra-high quality factor

Abstract

A 6.3 MHz Lamé-mode square resonator with fully differential drive and sense electronics, exhibiting quality factor (Q) values over 1 million in ambient pressures as high as 200 Pa is reported. A maximum Q value of 1.6 million was experimentally measured for the resonator designed for this study. It was also experimentally observed that the Q value for the designed bulk mode resonator was relatively independent for pressures below 200 Pa, suggesting that the Q is pressure limited for pressure higher than 200 Pa.