Small · 2010 · 164 citations · 30 references
Natural SciencesMaterials EngineeringMaterials ScienceOpticsOptoelectronicsPhotonicsIntegrated PhotonicsInterferometryOptical Thin FilmsPhotonic MaterialsRefractive IndexWave OpticsAnti-reflection CoatingsAnti-reflective SurfacesInterference LithographyNanofabrication Of Photonic StructuresOptical LithographySub-wavelength PatterningSubwavelength Periodic Structures
Subwavelength structures (SWSs) with a parabola shape are fabricated by a combination of laser interference lithography of a photoresist (PR), thermal reflow, and subsequent pattern transfer. The SWSs show antireflection properties in a broader wavelength range than conventional cone-shaped SWSs, and have potential in optoelectronics for improved device performance.
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