Publication | Closed Access
Temperature dependence of heavy ion-induced current transients in Si epilayer devices
49
Citations
29
References
2002
Year
Semiconductor TechnologyElectrical EngineeringSi Epilayer DevicesEngineeringIon ImplantationBias Temperature InstabilitySilicon DebuggingApplied PhysicsTemperature DependenceCurrent ResponseIon BeamSemiconductor Device FabricationInstrumentationElectronic PackagingMicroelectronicsSilicon On InsulatorSemiconductor Device
We report on the temperature dependence of the heavy-ion transient-ion beam induced current response of Si epilayer devices from 80 to 300 K. The measurements were performed on a heavy-ion microbeam in conjunction with the new transient-ion beam induced current system developed at the Japan Atomic Energy Research Institute. Furthermore, we perform a detailed comparison with technology computer-aided design (TCAD) simulations and discuss the results in terms of TCAD modeling, experimental procedure, and the implications for temperature-related single-event upset modeling.
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