FinFET technology for future microprocessors

K. Ludwig, Aller, Gernhoefer, Keinert, Nowak, Joshi, Mueller, Tomaschko

2003 · 30 citations · 1 references

Concepts

Abstract

For the first time we have converted an existing SOI microprocessor design to enable processing in a 0.1 /spl mu/m FinFET technology. We describe the methodology and tools set that has been developed for this conversion and point out the circuit design issues on SRAM-cell and other circuit structures, necessary in a microprocessor design.

References

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