SiGe micro-cooler

Gehong Zeng, Ali Shakouri, Chris LaBounty, G. Robinson, E. T. Croke, P. Abraham, Xiaofeng Fan, H. Reese, John E. Bowers

Electronics Letters · 1999 · 54 citations · 6 references

Concepts

Abstract

Thin film SiGe heterostructure coolers have been fabricated and characterised. Cooling by as much as 1.1 K at room temperature and 1.6 K at a substrate temperature of 70°C over a 3 µm Si/SiGe superlattice barrier has been measured. This corresponds to cooling power densities of hundreds of watts per square centimetre.

References

6