A dispatching rule for photolithography scheduling with an on-line rework strategy

Scheduling semiconductor wafer fabrication

Lawrence M. Wein · IEEE Transactions on Semiconductor Manufacturing · 1988 · 659 citations

Engineering, Industrial Engineering, Manufacturing Engineering +17

Efficient scheduling policies to reduce mean and variance of cycle-time in semiconductor manufacturing plants

S.C.H. Lu, D. Ramaswamy, Pappu Kumar · IEEE Transactions on Semiconductor Manufacturing · 1994 · 393 citations

Engineering, Industrial Engineering, Manufacturing Engineering +17

Closed-loop job release control for VLSI circuit manufacturing

C. Roger Glassey, Maurício G. C. Resende · IEEE Transactions on Semiconductor Manufacturing · 1988 · 346 citations

Management, Industrial Engineering, Manufacturing Engineering +17

A new scheduling approach using combined dispatching criteria in wafer fabs

Russ M. Dabbas, John Fowler · IEEE Transactions on Semiconductor Manufacturing · 2003 · 151 citations

Management, Industrial Engineering, Operations Management +14

Cycle-time improvements for photolithography process in semiconductor manufacturing

E. Akcalt, K. Nemoto, Reha Uzsoy · IEEE Transactions on Semiconductor Manufacturing · 2001 · 135 citations

Engineering, Manufacturing Engineering, Manufacturing Processes +12