Concepedia

E. Akcalt

EA

1

Publications

132

Citations

1

H-Index

2001

Active since

Affiliations

Purdue University West Lafayette(Current)

E. Akcalt is an author at Purdue University West Lafayette specializing in computer engineering, engineering, and technology.

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Publications per year

2001–2001

1

Publications

1

Cycle-time improvements for photolithography process in semiconductor manufacturing

E. Akcalt, K. Nemoto, Reha Uzsoy · IEEE Transactions on Semiconductor Manufacturing · 2001 · 132 citations

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