Publication | Open Access

A comparative study on material selection of microelectromechanical systems electrostatic actuators using Ashby, VIKOR and TOPSIS

Materials ScienceElectroactive MaterialElectrical EngineeringEngineeringSoft RoboticsMicrofabricationMechanical EngineeringMechanical SystemsBiomimetic ActuatorMicroelectromechanical SystemsMaterial SelectionActuationElectronic-mechanical SystemMicroactuatorComparative Study