Fabrication of a Microtool in Electrophoretic Deposition for Electrochemical Microdrilling and in Situ Micropolishing

Abstract

This work describes a microtool fabrication procedure that incorporates the electrophoretic deposition method and an in situ process. The microtool was used in electrochemical micro drilling combined with micropolishing to drill and finish a microhole. Exactly how electrophoretic deposition parameters affect the tool diameter was also addressed. A microtool with an improved shape was obtained when using an appropriate electrophoretic deposition parameter. Following electrochemical microdrilling combined with in situ micropolishing, the inlet and outlet diameters and wall surface roughness of the machined microhole were improved.