Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1986 · 23 citations · 7 references
Natural SciencesMaterials SciencePhysicsCondensed Matter PhysicsMetallic MaterialsSolid State PhysicsCrystal GrowthCrystalline MaterialsDefects In Electronic MaterialsIon ImplantationLattice StructuresMetalsChanneling EffectsImplantation-induced Defect FormationIon Implantation EffectsLattice DamageLattice Physics
7