A new approach to convex corner compensation for anisotropic etching of (100) Si in KOH - Concepedia

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A new approach to convex corner compensation for anisotropic etching of (100) Si in KOH

62

Citations

3

References

1996

Year

Qingxin Zhang, Litian Liu, Zhijian Li

Sensors and Actuators A Physical

EngineeringMicrofabricationApplied PhysicsNew ApproachSemiconductor Device FabricationCorner CompensationSilicon On InsulatorMicroelectronicsPlasma EtchingAnisotropic Etching

References

	Year	Citations

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