aBCD18 - An advanced 0.18um BCD technology for PMIC application

Nam‐Kyu Park, Jaehan Cha, Kyung-Ho Lee, Haeung Jeon, Hyungsuk Choi, Juho Kim, Sun-goo Kim, Inseok Oh, E. Park, Jinyoung Chae,

IEEE International Symposium on Power Semiconductor Devices and ICs/Proceedings of the International Symposium on Power Semiconductor Devices & ICs/Proceedings of the ... International Symposium on Power Semiconductor Devices & ICs/Proceedings of the ... International Symposium on Power Semiconductor Devices and ICs · 2009 · 10 citations · 2 references

Concepts

Abstract

We present a new advanced 0.18 um BCD(Bipolar-CMOS-DMOS) technology with the key features being a 40 V HV-MOS and an SSTC(Sidewall Selective Transistor Cell) type EEPROM as well as complimentary available analog devices such as a high gain BJT, 4fF/um <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> MIM capacitor, and 10k Omega/sq. poly resistor. To reduce device area and enhance latch up immunity, a 15 um depth deep trench isolation process has been developed, which will help to significantly reduce the chip size.

References

2