Publication | Open Access
Stoichiometry of Nickel Oxide Films Prepared by ALD
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Citations
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References
2011
Year
Materials ScienceMaterials EngineeringOxide HeterostructuresCrystal StructureEngineeringAluminium NitrideCorrosionOxide ElectronicsSurface ScienceApplied PhysicsSolid-state ChemistryChemistryThin FilmsChemical DepositionAtomic Layer DepositionAerobic Annealing
Nickel oxide films obtained from nickelocene and ozone by atomic layer deposition at 230°C are substoichiometric, but have the crystal structure of NiO. Oxygen can be driven out of the solid by annealing under inert atmosphere, or added into it via aerobic annealing.
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