Publication | Closed Access
Micromachined RF MEMS tunable capacitors using piezoelectric actuators
65
Citations
5
References
2002
Year
Unknown Venue
Electrical EngineeringEngineeringMicromachinesMicrofabricationRadio Frequency Micro-electromechanical SystemsMechatronicsPiezoelectric ActuatorsQuality FactorNano Electro Mechanical SystemLow Operation VoltageMicroactuatorMicroelectronicsMicro-electromechanical System
In this paper, RF MEMS tunable capacitors with low operation voltage, high linearity, high quality factor, and large tuning ratio have been fabricated by utilizing micromachined piezoelectric actuators. The fabricated tunable capacitor has a C/sub max//C/sub min/ ratio of 3.1 to 1 at bias voltages of 6 V and a quality factor of 210 at 1 GHz.
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