Publication | Open Access

Multi-scale modelling of silicon nanocrystal synthesis by Low Pressure Chemical Vapor Deposition

Materials EngineeringMaterials ScienceEngineeringNanoscale ChemistryMicrofabricationNanotechnologySilicon Nanocrystal SynthesisApplied PhysicsNanoscale ModelingSemiconductor Device FabricationChemical Vapor DepositionMicroelectronicsMulti-scale ModellingSilicon On Insulator