Publication | Closed Access
Macro-effects of resputtering due to negative ion bombardment of growing thin films
58
Citations
35
References
1993
Year
Materials ScienceMaterials EngineeringIon ImplantationEngineeringMicrofabricationSurface ScienceApplied PhysicsIon BeamNegative Ion BombardmentThin FilmsChemical DepositionIon EmissionChemical Vapor DepositionMicrostructure
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