Miniature and MOEMS flow sensors

Abstract

Recent progress in the development of a miniature Laser Doppler Anemometer (LDA) and a micro optical shear stress sensor is described. Miniaturization of these sensors has been achieved with the use of integrated optics and micro fabrication techniques. This paper describes the fabrication of the two sensors and presents an experiment for the evaluation of the sensors. The results show perfect agreement between the boundary layer velocity gradient performed with the LDA, and the measurements obtained with the shear stress sensor. The range of experimental conditions suitable for the wall shear sensor is reported. Finally, we describe the application of the sensors in a series of tests performed at the William B. Morgan Large Cavitation Channel of the Navy’s Carderock Division, in Memphis, Tennessee.