Toggle-switch - a new type of RF MEMS switch for power applications

Abstract

A new type of RF MEMS switch for power applications using a push-pull concept is described. The switching element consist of a cantilever which is fixed by a suspension spring to the ground of the coplanar lines. The switching voltages are 30 V to close and 35 V to open. The switches exhibit low loss (<0.2 dB at 27 GHz) with good isolation (20 dB at 27 GHz).