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Correlation between the growth-per-cycle and the surface hydroxyl group concentration in the atomic layer deposition of aluminum oxide from trimethylaluminum and water

Materials ScienceAluminium NitrideEngineeringAluminum OxideSurface ChemistryCorrosionSurface ScienceChemistryChemical DepositionChemical Vapor DepositionAtomic Layer DepositionAnodizing