Lateral force curve for atomic force/lateral force microscope calibration

Abstract

In this letter, a method to calibrate sensitivity for the three-dimensional displacement of X, Y, and Z directions by using the novel force curve, namely lateral force curve, as well as vertical force curve in atomic force/lateral force microscope (AFM/LFM) measurement is described. Furthermore, from quantized friction measurement based on the two-dimensional stick–slip model, it is experimentally confirmed that this lateral force curve calibration is reasonable.