Growth morphology and crystallographic orientation of β-SiC films formed by chemical conversion

Infrared Properties of Cubic Silicon Carbide Films

W. G. Spitzer, D. A. Kleinman, C. J. Frosch · Physical Review · 1959 · 222 citations

Natural Sciences, Materials Engineering, Materials Science +17

The Thermal Decomposition of Silane

T. R. Hogness, T. L. Wilson, W. Curtis Johnson · Journal of the American Chemical Society · 1936 · 96 citations

Pharmacy, Chemistry, Analytical Chemistry +8

Epitaxial Growth of Silicon from the Pyrolysis of Monosilane on Silicon Substrates

B.A. Joyce, R. R. Bradley · Journal of The Electrochemical Society · 1963 · 92 citations

Natural Sciences, Materials Engineering, Materials Science +17

THE GROWTH OF SINGLE-CRYSTAL FILMS OF CUBIC SILICON CARBIDE ON SILICON

I. H. Khan, R. N. Summergrad · Applied Physics Letters · 1967 · 67 citations

Engineering, Materials Engineering, Materials Science +17

Epitaxial Growth of SiC Film on Silicon Substrate and Its Crystal Structure

Hisao Nakashima, Takuo Sugano, Hisayoshi Yanai · Japanese Journal of Applied Physics · 1966 · 34 citations

Engineering, Materials Engineering, Materials Science +17