Characterization of plasma-surface contacts in low-pressure rf discharges using ion energy analysis and langmuir probes'

The Effect of Space Charge and Residual Gases on Thermionic Currents in High Vacuum

Irving Langmuir · Physical Review · 1913 · 1K citations

Natural Sciences, Materials Science, Physics +12

The Bohm criterion and sheath formation

K.‐U. Riemann · Journal of Physics D Applied Physics · 1991 · 1K citations

Natural Sciences, Physics, Nuclear Physics +16

Measurement of electron energy distribution in low-pressure RF discharges

Valery Godyak, R. B. Piejak, B. M. Alexandrovich · Plasma Sources Science and Technology · 1992 · 759 citations

Natural Sciences, Electrical Engineering, Microelectronics +15

Positive-ion bombardment of substrates in rf diode glow discharge sputtering

J. W. Coburn, E. Kay · Journal of Applied Physics · 1972 · 421 citations

Natural Sciences, Electrical Engineering, Physics +13

Auger Ejection of Electrons from Tungsten by Noble Gas Ions

H. D. Hagstrum · Physical Review · 1954 · 375 citations

Natural Sciences, Materials Science, Physics +6