Publication | Closed Access
Rapid direct micromachining of PTFE using MeV ions in an oxygen rich atmosphere
11
Citations
13
References
2005
Year
Chemical EngineeringElectrical EngineeringMev IonsEngineeringMicromachinesMicrofabricationRapid Direct MicromachiningOxygen Rich AtmosphereMicroscale SystemPropulsionVacuum DeviceMicroelectronicsMicro TechnologyMicro-electromechanical SystemMicrofluidics
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