Publication | Closed Access
Etching of 10Boron with SF6-based Electron Cyclotron Resonance Plasmas for Pillar-Structured Thermal Neutron Detectors
14
Citations
12
References
2010
Year
EngineeringNuclear PhysicsPhysicsElectron-beam LithographyNatural SciencesApplied PhysicsNeutron SourceDetector PhysicPlasma EtchingMicroelectronicsNeutron Scattering
| Year | Citations | |
|---|---|---|
Page 1
Page 1