Applied Mathematical Modelling · 2011 · 39 citations · 31 references
EngineeringElectrical EngineeringMechanical EngineeringActuatorsMicroelectromechanical SystemsMicrofabricationElectric ActuatorsMems ActuatorsMems DesignPiezoelectric ActuationPiezoelectric ActuatorsPiezoelectric MaterialsBeam MechanicsMicroelectromechanical ActuatorsPiezoelectric Beam TheoryPiezoelectric EffectPiezoelectric Mems ActuatorsPull-in InstabilityPull-in Instability Analysis
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