The role of ion/surface interactions and photo-induced reactions during film growth from the vapor phase - Concepedia

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The role of ion/surface interactions and photo-induced reactions during film growth from the vapor phase

38

Citations

85

References

1987

Year

J. E. Greene, Teruaki Motooka, J.‐E. Sundgren, D. Lubben, S. M. Gorbatkin, Scott A. Barnett

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

EngineeringPhotochemistryVapor PhaseSurface ScienceApplied PhysicsFilm GrowthIon/surface InteractionsVacuum DeviceChemistryThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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