Vibration compensation for high speed scanning tunneling microscopy

Abstract

Low scanning speed is a fundamental limitation of scanning tunneling microscopes (STMs), making real time imaging of surface processes and nanofabrication impractical. The effective scanning bandwidth is currently limited by the smallest resonant vibrational frequency of the piezobased positioning system (i.e., scanner) used in the STM. Due to this limitation, the acquired images are distorted during high speed operations. In practice, the achievable scan rates are much less than 1/10th of the resonant vibrational frequency of the STM scanner. To alleviate the scanning speed limitation, this article describes an inversion-based approach that compensates for the structural vibrations in the scanner and thus, allows STM imaging at high scanning speeds (relative to the smallest resonant vibrational frequency). Experimental results are presented to show the increase in scanning speeds achievable by applying the vibration compensation methods.