Publication | Closed Access

The enhancement of homogeneity in the textured structure of silicon crystal by using ultrasonic wave in the caustic etching process

Materials EngineeringMaterials ScienceAcoustic MicroscopyEngineeringMicrofabricationSurface ScienceApplied PhysicsSilicon CrystalCaustic Etching ProcessPlasma EtchingUltrasoundSilicon On InsulatorUltrasonic WaveMicrostructureMicromachined Ultrasonic Transducer