Materials Letters · 2004 · 30 citations · 0 references
Natural SciencesMaterials SciencePhysicsAcousticsMicrofabricationThin FilmsAcoustic MaterialsAcoustic Wave PropagationBulk MicromachiningPhysical AcousticsThin Film Mechanical PropertiesUltrasonicsAcoustic Impedance EngineeringBulk Mode ResonatorsFilm Bulk Acoustic ResonatorsResonator DesignThin Film Waves