Preparation and Characterization of CuInSe₂ Thin Films by Molecular-Beam Deposition Method

Abstract

Polycrystalline CuInSe 2 films were prepared by coevaporation of the elements under an ultrahigh vacuum by a molecular-beam deposition method. The composition of the film was controlled by changing the In molecular-beam flux intensity while the other elements remained at a constant value. It is shown, at the substrate temperature of 500°C, that there is a critical In molecular-beam flux intensity for the fabrication of stoichiometric films. At the In molecular-beam intensities higher than the critical value, single-phase CuInSe 2 films with nearly constant compositions are obtained as a result of the removal effects of excess In. It is shown that the present coevaporation process is suitable for the fabrication of stoichiometric or slightly In-rich composition films. Furthermore, the structural and electrical properties of the films were investigated and discussed in relation to film composition.