Microetching of fused silica by laser ablation of organic solution with XeCl excimer laser - Concepedia

Concepedia

Publication | Closed Access

Microetching of fused silica by laser ablation of organic solution with XeCl excimer laser

47

Citations

15

References

2002

Year

Yukinori Yasui, Hiroyuki Niino, Yoshizo Kawaguchi, A. Yabe

Applied Surface Science

Materials ScienceChemical EngineeringAdvanced Laser ProcessingEngineeringOrganic SolutionLaser Micro-processingMicrofabricationLaser PhotochemistryLaser ApplicationsLaser AblationLaser Processing TechnologyLaser-assisted DepositionExcimer Lasers

References

	Year	Citations

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