Topography of an electron cyclotron resonance plasma in the vacuum-ultraviolet spectral range

Abstract

The plasma topography of the vacuum-ultraviolet (VUV) radiation source ELISA (electron cyclotron resonance light source assembly) was investigated. ELISA is operated at a VUV spectrometer which allows two-dimensional images of the axially observable plasma shape to be taken with a spatial resolution of 150 μm in the spectral range from 40 to 400 nm. The VUV radiance profile of the electron cyclotron resonance plasma was investigated for different working conditions of the source, with the source operated with nitrogen and krypton. Under specific operating conditions, the observed plasma radiance profile shows a structure similar to calculations performed by the group of Andrä. It was shown for the first time that the plasma topography can be interpreted by an electron density distribution as simulated there for a monomode electron cyclotron resonance ion source.